Self-aligned slotted accumulation-mode field effect transistor (AccuFET) structure and method

ABSTRACT

This invention discloses a semiconductor power device disposed in a semiconductor substrate. The semiconductor power device includes trenched gates each having a stick-up gate segment extended above a top surface of the semiconductor substrate surrounded by sidewall spacers. The semiconductor power device further includes slots opened aligned with the sidewall spacers substantially parallel to the trenched gates. The stick-up gate segment further includes a cap composed of an insulation material surrounded by the sidewall spacers. A layer of barrier metal covers a top surface of the cap and over the sidewall spacers and extends above a top surface of the slots. The slots are filled with a gate material same as the gate segment for functioning as additional gate electrodes for providing a depletion layer extends toward the trenched gates whereby a drift region between the slots and the trenched gate is fully depleted at a gate-to-drain voltage Vgs=0 volt.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The invention relates generally to the vertical semiconductor powerdevices. More particularly, this invention relates to configurations andmanufacturing methods for providing a self-aligned accumulation-modefield-effect transistor (AccuFET) with ultra-small pitch to achieve ahigh power density with minimized parasitic bipolar actions for highdevice ruggedness while simplified manufacturing process to produce lowcost semiconductor power devices suitable for implementation with both Nand P-channel configurations.

2. Description of the Prior Art

Conventional manufacturing technologies and device configurationencounter several technical difficulties when the cell pitch of thetrench-DMOS devices is further reduced. Specifically, the devicestructure is weakened due to the increase of the parasitic bipolaractions. As the cell pitch becomes smaller, it is difficult to formeffective body contact with low resistance. The increase in theresistance of the body region due to the difficulties of smallerdimensions available for the contact areas further results the increasedparasitic bipolar current gain. For NMOS devices, the increasedparasitic bipolar actions weakened the devices and prevent the devicesto achieve a high UIS rating.

A device implemented with the accumulation mode field effect transistorshas the benefits that there is no parasitic bipolar structure becausethere are no P-body regions for the NMOS device. For an N-channeldevice, an enhancement mode of operation can be achieved by using a P+doped gate combined with appropriately selected epitaxial doping andgate to gate spacing to achieve a fully depleted channel region with noconduction when the gate-to-drain voltage Vgs is at zero volt. Baliga etal. disclosed the configuration of an AccuFET device in an articleentitled “The Accumulation-Mode Field-effect Transistor: A new Ultra LowOn-Resistance MOSFET” (IEEE EDL, August 1992, Page 427).

Additional disclosures for the AccuFET devices were made in differentU.S. Patents, such as U.S. Pat. No. 4,903,189 with a deviceconfiguration shown in FIG. 1A. Another device configuration shown inFIG. 1B is disclosed in U.S. Pat. No. 5,581,100. Furthermore, U.S. Pat.No. 5,844,273 discloses different AccuFET device configurations shown inFIG. 1C. However, these disclosures for manufacturing the AccuFETdevices still have limitations that a small cell pitch with shortchannel vertical AccuFET configuration cannot be achieved. Additionally,for certain applications, an integration of an efficient body structurewithin the device with a negatively biased drain is desirable. However,conventional configurations and methods of manufacturing the AccuFETdevices cannot satisfy such demands.

Therefore, a need still exists in the art of power semiconductor devicedesign and manufacture to provide new device configurations and methodsof manufacturing the AccuFET devices such that the above discussedproblems and limitations can be resolved.

SUMMARY OF THE PRESENT INVENTION

It is therefore an aspect of the present invention to provide a new andimproved device structure and methods of manufacturing a self-alignedslotted AccuFET device with self-aligned short channel having smallercell pitch by applying manufacturing methods compatible with standardfoundry processes such that the above discussed limitations anddifficulties can be resolved.

Specifically, it is an aspect of the present invention to provide a newand improved device structure and methods of manufacturing aself-aligned slotted AccuFET device with polysilicon stick-up gatesformed with sidewall spacers and nitride gate cap to define and alignthe location and dimension of the slots thus achieving small cellpitches.

It is another aspect of the present invention to provide a new andimproved device structure and methods of manufacturing a self-alignedslotted AccuFET device with self-aligned threshold control slots andwith elimination of the parasitic bipolar latch-up to achieve highruggedness under all operating conditions and to maximize the safeoperating area (SOA) of the power device.

It is another aspect of the present invention to provide a new andimproved device structure and methods of manufacturing a self-alignedslotted AccuFET device with polysilicon stick-up gates formed withsidewall spacers and nitride gate cap to define and align the locationand dimension of the slots. Furthermore, the slots may have differentembodiments including but not limited to implementing the slots asSchottky slots, oxide slots and doped polysilicon slots to satisfyrequirements of different applications.

Briefly in a preferred embodiment this invention discloses asemiconductor power device disposed in a semiconductor substrate. Thesemiconductor power device includes trenched gates each having astick-up gate segment extended above a top surface of the semiconductorsubstrate surrounded by sidewall spacers. The semiconductor power devicefurther includes slots formed in the channel region between gates andaligned with the sidewall spacers substantially parallel to the trenchedgates. The stick-up gate segment further includes a cap composed of aninsulation material surrounded by the sidewall spacers. A layer ofbarrier metal covers a top surface of the cap and over the sidewallspacers and extends above a top surface of the slots. The slots arefilled with a gate material same as the gate segment for functioning asadditional gate electrodes for providing a depletion layer extendstoward the trenched gates whereby a drift region between the slots andthe trenched gate is fully depleted at a gate-to-drain voltage Vgs=0volt.

Furthermore, this invention discloses a method for manufacturing asemiconductor power device disposed in a semiconductor substrate. Themethod includes a step of forming trenched gates with a stick-up gatesegment extended above a top surface of the semiconductor substratesurrounded by sidewall spacers. The method further includes a step ofapplying a self-aligned etching process to open slots aligned with thesidewall spacers substantially parallel to the trenched gates.

These and other objects and advantages of the present invention will nodoubt become obvious to those of ordinary skill in the art after havingread the following detailed description of the preferred embodiment,which is illustrated in the various drawing figures.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1C are cross sectional views for showing conventionalAccuFET power device configurations manufactured by conventionalmethods.

FIGS. 2 to 7 are cross sectional views of the self-aligned slottedAccuFET power devices of this invention.

FIGS. 8A and 8B are perspective views of the AccuFET device configuredwith transistors of stripe cells and closed cells.

FIG. 9 is a cross sectional view of another AccuFET device formed on asubstrate with particular epitaxial layer structure to improve pinch-offperformance.

FIGS. 10A and 10K are a series of cross sectional views to illustrateprocessing steps of this invention to manufacture the AccuFET powerdevice of FIG. 2.

FIGS. 11A to 11M are a series of cross sectional views to illustrateprocessing steps of this invention to manufacture the AccuFET powerdevice of FIG. 3.

FIGS. 12A to 12K are a series of cross sectional views to illustrateprocessing steps of this invention to manufacture the AccuFET powerdevice with slots filled with a barrier metal.

FIGS. 13A to 13M are a series of cross sectional views to illustrateprocessing steps of this invention to manufacture the AccuFET powerdevice with slots filled with a polysilicon.

FIGS. 14A to 14L discloses a cross sectional view of device manufacturedby the processing similar to that described in FIGS. 13A to 13M byskipping the boron implants and the optional anneal process in theslot-gate regions.

FIGS. 15A to 15K are a series of cross sectional views to illustrateprocessing steps of this invention to manufacture the AccuFET powerdevice with Schottky implemented in every slot-gate.

DETAILED DESCRIPTION OF THE METHOD

Referring to FIG. 2 for a cross sectional view of an accumulation modefield effect transistor (AccuFET) device 100 with shallow implant slotsof this invention. The AccuFET device 100 is supported on an N+ siliconsubstrate 105 functioning as a drain terminal or electrode on a bottomsurface of the substrate. The N+ substrate 105 supports a N-drift region110-2 formed as a first epitaxial layer immediately on top of the N+drain region 105. A second N-epitaxial layer 110-1 is supported on topof the drift region 110-2. The AccuFET device 100 includes a pluralityof trenched gates filled with a polysilicon layer 120. In an exemplaryembodiment, for an N-channel device, the trench gate is filled with aP-doped polysilicon layer 120. Each of the trenched polysilicon gates iscovered with a nitride cap 125 with sidewalls of the trenches paddedwith a gate oxide layer 115. Nitride is selected since it is adielectric material with a different etch rate than oxide layers. Otherdielectric materials with different etch rate than oxide can also beconsidered such as oxynitride, etc. . . . . The polysilicon layer 120extends above the top surface of the substrate covered with the nitridecap 125 are surrounded by a spacer layer 135.

The AccuFET device 100 further includes N+ source regions 130surrounding the trenched gate 120 near the top surface of the substrateand extended laterally beyond the substrate area underneath the spacer135 to contact the P-type slot regions 140 formed in the secondepitaxial layer 110-1 underneath a slot opened between the spacer layer135. As will be further discussed below in the descriptions of themanufacturing processes that the slots are formed by applying a dry etchprocess taking advantage of the self-alignment between the spacers 135thus achieving a slot dimension much less than the minimum criticaldimension (CD) of the process. The P-slot regions 140 are implantedthrough the slots. A barrier layer 145 is formed covering the exposedtop surface of the source regions 130 and the slot regions 140 throughthe top surface of the slots thus enhancing the source contact to thesource metal 150.

The AccuFET device 100 as shown in FIG. 2 thus provides a verticalAccuFET structure that has trench gates with self-aligned slots for athreshold voltage control. Each of the slots influences the thresholdvoltage of the device by acting as a second gate electrode embedded inthe channel. The second gate electrode is parallel to the trench-gateelectrode providing a depletion layer. The depletion layer extends awayfrom the slot towards the other depletion layer originated from thetrench-gate polysilicon electrode. For enhancement mode operation, thekey is to have the second epitaxial layer 110-1 region fully depleted ata Vgs=0V. However, the doping concentration of the second epitaxiallayer 110-1 is maximized in order to minimize the resistance. A higherdopant concentration of the second epitaxial layer 110-1 challenges thegoal of achieving a fully depleted region (110-1) at Vgs=0V. In order toachieve this goal, the width of the region must become very small thatmay impact the device manufacturability. Adding the slot as additionalgate electrodes enables the use of a wider silicon region betweentrench-gate electrodes, while maximizing the doping concentration of thesecond epitaxial layer 110-1. Standard 20-30V AccuFET without a slot mayneed a “mesa width”, i.e., silicon width between trenches, of only 0.2microns, and the doping would have to be in the 1E15 to 2E15 or so. Byusing a slot, the “mesa” width can be increased to approximately 0.4 um.The increased mesa width is more easy and convenient to manufacture andthe doping can be raised significantly to a range of up to about 1E16range. A device is provided to achieve the design goals of minimizingpitch and maintaining an enhancement mode of operation.

The vertical self-aligned structure of the slotted trench gates isachieved by taking advantage of the trenched gate with stick-uppolysilicon gates 120 surrounded by sidewall spacers 135 for definingthe locations and dimensions of the slots. The details of theself-alignment are more specifically described below in FIGS. 10 to 15in describing various embodiments and the manufacturing processes of theAccuFET devices of this invention. The structures as disclosed forvarious embodiments of the AccuFET devices provide self-aligned shortchannel in the vertical AccuFET structures having small cell pitch. Thedevice and the processes of manufacturing are compatible with standardfoundry processes and can be produced with low and economicalmanufacturing cost. The device structure provides further advantages ofintegrating an efficient body structure with the device when the drainis negatively biased that is especially advantageous for certainapplications. For example, in switching applications such as DC to DCpower conversion using typical DC-to-DC converter. The DC-to-DCconverter has a high-side MOSFET, low-side MOSFET and an inductorconnected between the drain of the low side implemented as an outputterminal and the load. The current flow can reverse through the low-sidedevice, by flowing through the body diode of the low-side MOSFET. Forincreased efficiency, Schottky diodes are preferred to minimize theforward conduction losses. Efficient Schottky structures can beintegrated in the Slotted AccuFET structures as discussed here andfurther described later in different embodiments. More detailed andspecific benefits of such applications are discussed, for example, inthe Maxim Application notes(http://www.maxim-ic.com/appnotes.cfm/appnote_number/2031).

FIG. 3 is a cross section for showing another exemplary embodiment of anAccuFET device of this invention. FIG. 3 shows an AccuFET device that issimilar to the device shown in FIG. 2 except that the slot regions 140′are formed along the sidewalls of the slots between the gate sidewallspacers 135 with the slots filled with P-doped polysilicon 142. The keyfeatures of this embodiment are that the slots are doped in aself-aligned fashion by using doped polysilicon, e.g., the P-dopedpolysilicon, deposited in narrow slots etched in a self-aligned fashionalong the periphery of the stick-up polysilicon trench-gates. The slotscan be planarized (filled to improve the planarity of the structure)using the doped polysilicon.

FIG. 4 is a cross section for showing another exemplary embodiment of anAccuFET device of this invention. FIG. 4 shows an AccuFET device that issimilar to the device shown in FIG. 2 except that the slots are formedas open slots and P-doped regions 140′ are formed along the sidewalls ofthe slots between the gate sidewall spacers 135. Furthermore, thebarrier metal layer 145 extends inside the slot gate regions dependingon the width of the slots. The barrier metal layer 145 is composed ofTi/TiN barrier metal. This embodiment enables the realization of a slotstructure that is contacted directly by the source metal. The sourcemetal may be implemented either with Schottky metal when the P-dopant140′ is light. Alternately, the source metal may be ohmic metal when theP-dopant 140′ is heavily doped. Adjusting the dopant level of 140′ cantherefore adjust the barrier height of the Schottky slot region. Anadditional advantage is that the process is simplified by eliminatingthe need for filling the slot prior to metal deposition.

FIG. 5 is a cross section for showing another exemplary embodiment of anAccuFET device of this invention. FIG. 5 shows an AccuFET device that issimilar to the device shown in FIG. 2 except that the P-doped slotregions 140′ are formed along the sidewalls of the slots between thegate sidewall spacers 135. Furthermore, slot gate regions are filledwith an insulation material to form slot gate insulation regions 142″ sothat the source electrode made of source metal 150 and barrier metal 145does not contact the P-doped slot gate regions 140′. The barrier metallayer 145 covers the slot gate insulation regions 142″. The slot gateregions 140′ are maintained at a floating state with no contact to thesource metal 150. This embodiment ensures that the slot region 140′ iseffectively isolated from the source metal by insulating region 142″.The benefit is to achieve a reduced leakage since the P-region 140′ isnot connected to the source metal 150.

FIG. 6 is a cross section for showing another exemplary embodiment of anAccuFET device of this invention. FIG. 6 shows an AccuFET device that issimilar to the device shown in FIG. 2 except that the slots between thespacers 135 are now filled with oxide and become oxide slot regions142″. Therefore, the oxide slots 142″ has no electrically communicationwith the source regions 130 and function as channel stop with the activemesa structure. This embodiment features an insulated slot that has lowleakage since there is no P doped region. The oxide slots 142′ act as afield termination to maintain an adequate threshold voltage for thedepletion region with the depletion region extends from the trench-gatepolysilicon electrode.

FIG. 7 is a cross section for showing another exemplary embodiment of anAccuFET device of this invention. FIG. 7 shows an AccuFET device that issimilar to the device shown in FIG. 2 except that the slots between thespacers 135 are now covered with Schottky barrier metal layer 145′ tofunction as Schottky slot with no diffusion in contact. There are noP-dopants in the slot regions. The barrier metal functions as theP-Schottky shielded by the gate trenches. The Schottky barrier metal cancomprise of an Schottky metal such as titanium, cobalt, nickel,aluminum, tantalum, or platinum. This is an embodiment with structuralfeatures having a direct metal contact to N-type silicon Schottkycontact slot region. The Schottky contact slot region ensures anadequate threshold voltage because a depletion layer is formed. TheSchottky contact slot regions further ensure the reduced conductionlosses in some applications such as DC-to-DC power conversion, asdiscussed earlier.

The AccuFET device as disclosed above can be configured either as stripecells or closed cells as shown in FIGS. 8A and 8B respectively. Theclosed cell configuration shown in FIG. 8B has the advantage ofproviding enhanced pinch off as the slot region is completely surroundedby the trenched gate on four sides while in stripe cell configurationthe slot region is only surrounded by the trenched gate on two sides.

FIG. 9 is a cross sectional view to show an AccuFET device of thisinvention that has an epitaxial structure for incorporating a topsurface layer with a thickness deeper than the highly doped sourcecontact diffusion. The epitaxial layer 110-1 is deeper than the sourcecontact areas 130, but shallower than the trenched gate 120 and has arelatively lower dopant concentration than the N-drift region 110-2,e.g., 1E15/cm³. The device configuration as shown is useful to improvepinch-off while not increasing the Rdson resistance by much.

Referring to FIGS. 10A to 10M for a series of side cross sectional viewsto illustrate the fabrication steps of a semiconductor power deviceimplemented as a self-aligned accumulation-mode field effect transistor(ACCUFET) device as shown in FIG. 2. FIG. 10A shows a starting siliconsubstrate 205 supports a lower-doped top channel epitaxial layer 210-1slightly thicker than the depth of trenches and a higher doped driftregion 210-2. The manufacturing processes proceed with the formation ofa hard-mask oxide layer 212 by a local thermal oxidation (LTO)deposition or a thermal growth process. A trench mask (not shown) isapplied to first etch the hard-mask oxide layer 212 followed by asilicon etch to open trenches 218 in the epitaxial layer 210-1. Theprocess proceeds with a step of polymer strip to remove the chemicalresidues on trench sidewall resulting from trench etching. A round holeetch process is carried out as an optional step to smooth out thetrenches in order to minimize stress and improve step coverage ofsubsequent processing. In FIG. 10B, a sacrificial oxide layer is grownfollowed by a sacrificial oxide etch with controlled etch process torepair the damages caused by the trench etch process. Then a gate oxidelayer 215 is grown followed by deposition of polysilicon 220 and dopingof the polysilicon 220 with P+ dopant for depletion mode. In FIG. 10C, apolysilicon etch back process is carried out to etch the polysiliconlayer 220 by controlling the etch-back such that the polysilicon layer220 is removed to have height sticking out above the top surface of thesubstrate, but below the top of the hard mask layer 212; the height canbe about half of the thickness of the oxide hard-mask layer 212 so thatthe polysilicon gates 220 extend above the top surface of the siliconsubstrate.

In FIG. 10D, a nitride layer 225 is deposited by applying a low-pressurevapor chemical deposition (LPCVD) or pressurized electrical chemicalvapor deposition (PECVD) process. Then an optional etch-back mask (notshown) can be applied to etch back the nitride layer 225 while keepingportions of the nitride in the termination regions for specifiedapplications. In FIG. 10E, the nitride layer 225 is selectively etchedto have approximately same height as the hard oxide mask 212.Alternatively, the nitride layer 225 can be planarized with the hardmask 212 by chemical mechanical polishing (CMP). In FIG. 10F, the oxidehard mask 212 is stripped by applying a wet etch process. Then as anoption, a source mask (not shown) is applied, to carry out a sourceimplant. A blanket source implant can also be performed, without a mask,since the nitride cap 225 protects the polysilicon gate 220. Exemplarysource implant process may include a step of perpendicular arsenicimplant, i.e., zero tilt implant, with implant ion flux in a rangebetween 2E15 to 7E15 and an implanting energy between 30 to 80 key toform the source regions 230. A source annealing process is carried outat 900 to 950 C. In FIG. 10G, a spacer oxide layer 235 is deposited witha thickness between 0.1 to 0.5 micrometers. In FIG. 10H, the spaceroxide layer 235 is anisotropically etched back to form oxide spacers 235surrounding the polysilicon gate 220 and the nitride layer 225. In FIG.10I, a selective silicon etch is performed by applying selective siliconetchant, e.g. sulfur hexafluoride (SF6), to remove the silicon layerheavily doped with source ions 230 from the top surface of the substratearound the spacers 235 surrounding the polysilicon gate 220 capped witha top nitride layer 225. A plurality of recess slots having a depthsubstantially the same thickness as the source regions 230, e.g., 0.1 to0.4 micrometers, are therefore formed and the recessed slots are alignedwith the spacers 235. A blanket implant with boron ions with an implantdose of 1E12 to 1E14 and implant energy between 10-100 Kev is carriedout to form the P-doped slot regions 240 below the recessed slots.

In FIG. 10J, a gate contact mask (not shown) is applied to etch gatecontact openings (not specifically shown). Then a oxide isotropic etchback is performed, e.g. by wet buffer oxide etching (BOE), to reduce thethickness of the spacer layer 235 of a thickness reduction between 200Angstroms to 2000 Angstroms to expose the top surface of the sourceregions 230. In FIG. 10K, a barrier metal layer 245 is deposited overthe top surface to enhance the contact to the source and slot regions.Then a metal layer 250 is deposited over the top surface and patternedinto source metal 250-S and gate pads (not shown). The manufacturingprocesses completed with the formation of the passivation layer andfinal alloy processes (not specifically shown).

Referring to FIGS. 11A to 11M for a series of side cross sectional viewsto illustrate the fabrication steps to manufacture an alternateembodiment of an AccuFET device of this invention. The processing stepsfrom FIGS. 11A to 11H are the same as that shown in FIGS. 10A to 10H. InFIG. 11I, shows a process of applying SF6 etchant for carrying out aselective silicon etch using the oxide spacers 235 and the nitride gatecap 225 as a mask. The etch depth can be about two to three times thedepth of the source regions 230 that is approximately 0.4 to 0.8 micronsfor a device with pitch equal or less than one micrometer. A tiltedboron implant is carried out with an implanting dose of 1E12 to 1E14 atan energy between 10 to 100 Kev, preferably 5E12 at 10 Kev, having atilt angle of ±seven degrees with rotation operation to implant theP-slot region 240′ along the sidewalls of the slots etched between thespacers 235. An optional process may be carried out to form a shallowtrench bottom boron implant region. Alternatively, the P-slot regions240′ can be formed by diffusing P-dopant from the polysilicon layer 242deposited in FIG. 11J. In FIG. 11J, a polysilicon layer 242 having athickness of about 0.1 to 0.4 microns is deposited. The polysiliconlayer 242 may be doped with boron ions at a dose of 1E15 with implantingenergy of 10-60 Kev. The polysilicon may also be doped with a in-situboron doping process. A rapid thermal process (RTP) or diffusion may becarried out at 900 degrees Celsius for one minute for annealing thedevice. In FIG. 11K, a polysilicon etch back process is carried out toetch the polysilicon layer 242 from the top surface while leaving theoxide and the nitride cap 225 intact. The polysilicon layer 242 can beetched back to planarize it with the source regions 230. In FIG. 11L, aoxide selective etch back is performed, e.g., by wet BOE, to reduce thethickness of the spacer layer 235 of a thickness reduction between 200Angstroms to 2000 Angstroms to expose the top surface of the sourceregions 230. In FIG. 11M, a barrier metal layer 245 is deposited overthe top surface to enhance the contact to the source and the slottedgate regions followed by an annealing process. Then a metal layer 250 isdeposited over the top surface and patterned into source metal 250-S andgate pads (not shown). The manufacturing process is completed with theformation of the passivation layer and final alloy processes (notspecifically shown).

Referring to FIGS. 12A to 12M for a series of side cross sectional viewsto illustrate the fabrication steps to manufacture an alternateembodiment of an AccuFET device of this invention. The processing stepsfrom FIGS. 12A to 12H are the same as that shown in FIGS. 10A to 10H. InFIG. 12I, shows a process of applying SF6 etchant for carrying outselective silicon etch leaving only the oxide spacers 235 and thenitride gate cap 225. The etch depth is about two to three times thedepth of the source regions 230 that is approximately 0.4 to 0.8 micronsfor a device with pitch equal or less than one micrometer. A tilt boronimplant is carried out with an implanting dose of 1E12 to 1E14 at anenergy between 10 to 100 Kev, preferably 5E12 at 10 Kev, having a tiltangle of ±seven degrees with rotation operation to implant the P-slotregion 240′ along the sidewalls of the slots etched between the spacers235. An optional process may be carried out to form a shallow trenchbottom boron implant region. In FIG. 12J, an oxide select etch back isperformed, e.g., by wet BOE, to reduce the thickness of the spacer layer235 of a thickness reduction between 200 Angstroms to 2000 Angstroms toexpose the top surface of the source regions 230. In FIG. 12K, a barriermetal layer 245 is deposited over the top surface to enhance the contactto the source and the slotted gate regions and filling the slots betweenthe sidewall spacers 235 followed by an annealing process. Then a metallayer 250 is deposited over the top surface and patterned into sourcemetal 250-S and gate pads (not shown). The manufacturing processescompleted with the formation of the passivation layer and final alloyprocesses (not specifically shown). The barrier metal layer 245 may be aSchottky barrier metal and a light shallow P-dopant region to provide aShannon effect to adjust barrier height for reducing a leakage currentmay be implemented as well. U.S. patent application Ser. No. 11/890,851discloses the application of Shannon implant for adjusting barrierheight and is incorporated hereby for reference.

Referring to FIGS. 13A to 13M for a series of side cross sectional viewsto illustrate the fabrication steps to manufacture an alternateembodiment of an AccuFET device of this invention. The processing stepsfrom FIGS. 13A to 13H are the same as that shown in FIGS. 10A to 10H. InFIG. 13I, shows a process of applying SF6 etchant for carrying out aselective silicon etch leaving only the oxide spacers 235 and thenitride gate cap 225. The etch depth is about two to three times thedepth of the source regions 230 that is approximately 0.4 to 0.8 micronsfor a device with pitch equal or less than one micrometer thus formingthe slots 238 between the oxide sidewall spacers 235. In FIG. 13J, atilt boron implant is carried out with an implanting dose of 1E12 to1E14 at an energy between 10 to 100 Kev, preferably 5E12 at 10 Kev,having a tilt angle of ±seven degrees with rotation operation to implantthe P-slot region 240′ along the sidewalls of the slots etched betweenthe spacers 235. An optional process may be carried out to form ashallow trench bottom boron implant region. In FIG. 13K, thermaloxidation process at a low temperature of 800-900 degree Celsius withsteam is carried out to oxidize fill the slots 238 with oxide withoutimpacting the spacers 235 and the P+ poly gate regions 220. The N+source regions 230 grow more oxide through doping enhanced diffusionthat closes the top region of the slot-gate 238. In FIG. 13L, an oxideselect etch back is performed, e.g., by wet dilute BOE, to reduce thethickness of the spacer layer 235 of a thickness reduction between 200Angstroms to 2000 Angstroms to expose the top surface of the sourceregions 230. In FIG. 13M, a barrier metal layer 245 is deposited overthe top surface to enhance the contact to the source and the slottedgate regions. Then a metal layer 250 is deposited over the top surfaceand patterned into source metal 250-S and gate pads (not shown). Themanufacturing processes completed with the formation of the passivationlayer and final alloy processes (not specifically shown).

FIGS. 14A to 14L shows an alternate exemplary embodiment manufactured bythe same processing step as shown in FIGS. 13A to 13M. The onlydifferences are the processing steps of the device shown in FIG. 14A to14L skip the boron implants and the optional anneal process in the slotgate regions.

Referring to FIGS. 15A to 15K for a series of side cross sectional viewsto illustrate the fabrication steps to manufacture an alternateembodiment of an AccuFET device of this invention that has Schottkyslot-gate in every cell. The processing steps from FIGS. 15A to 15H arethe same as that shown in FIGS. 10A to 10H. In FIG. 15I, shows a processof applying SF6 etchant for carrying out a selective silicon etchleaving only the oxide spacers 235 and the nitride gate cap 225. Theetch depth is about two to three times the depth of the source regions230 that is approximately 0.4 to 0.8 microns for a device with pitchequal or less than one micrometer. In FIG. 15J, an oxide select etchback is performed, e.g., by wet BOE, to reduce the thickness of thespacer layer 235 of a thickness reduction between 200 Angstroms to 2000Angstroms to expose the top surface of the source regions 230. In FIG.15K, a barrier metal layer 245 is deposited over the top surface toenhance the contact to the source and the slotted gate regions andcovering the slots between the sidewall spacers 235 followed by anannealing process. The barrier metal may be aluminum, Ti/TiN or Schottkybarrier metal to provide an Schottky slot-gate in every cell.

Although the present invention has been described in terms of thepresently preferred embodiment, it is to be understood that suchdisclosure is not to be interpreted as limiting. Various alterations andmodifications will no doubt become apparent to those skilled in the artafter reading the above disclosure. Accordingly, it is intended that theappended claims be interpreted as covering all alterations andmodifications as fall within the true spirit and scope of the invention.

We claim:
 1. An accumulation mode field effect transistor (AccuFET)comprising: trenched gates disposed in trenches opened in a topepitaxial layer on top of a bottom epitaxial layer both are doped with afirst conductivity type wherein the top epitaxial layer having a higherdopant concentration and encompassing a source region near a top surfaceof a semiconductor substrate surrounding said trenched gates whereineach trenched gate is padded by a gate oxide layer and surroundedcompletely by regions of said first conductivity type including saidsource region and said top epitaxial layer of said first conductivitytype and wherein said trenched gate includes a gate material of a secondconductivity type filling the trenches and supporting a stick-up gatesegment with the gate material extended above a top surface of saidsemiconductor substrate and the stick-up segment is surrounded bysidewall spacers disposed above the source region; and slots opened inthe top epitaxial layer between the sidewall spacers and parallel to anddisposed at a distance away from said trenched gates wherein said slotsextended into said top epitaxial layer of the first conductivity typeand completely filled with the gate material doped with said secondconductivity type and surrounded directly by said top epitaxial layer ofsaid first conductivity type wherein said slots filled with said gatematerial contacting the source region laterally extended underneath thesidewall spacers from sidewalls of the trenched gates to the slots. 2.The accumulation mode field effect transistor of claim 1 wherein: saidstick-up gate segment further having a cap composed of an insulationmaterial surrounded by said sidewall spacers.
 3. The accumulation modefield effect transistor of claim 2 further comprising: a layer ofbarrier metal covering a top surface of said cap and covering saidsidewall spacers extending above a top surface of said slots.
 4. Theaccumulation mode field effect transistor semiconductor power device ofclaim 1 further comprising: a barrier metal layer composed of an ohmicmetal layer covering a top surface of said slots to enhance anelectrical contact between the source region and the gate materialfilled in the slots.
 5. The accumulation mode field effect transistorsemiconductor power device of claim 1 further comprising: a plurality ofaccumulation mode field effect transistor (AccuFET) cells configuredwith a stripe layout.
 6. The accumulation mode field effect transistorsemiconductor power device of claim 1 further comprising: a plurality ofaccumulation mode field effect transistor (AccuFET) cells configuredwith a closed cell layout.
 7. An accumulation mode field effecttransistor (AccuFET) comprising: trenched gates disposed in trenchesopened in a top epitaxial layer on top of a bottom epitaxial layer bothare doped with a first conductivity type wherein the top epitaxial layerhaving a higher dopant concentration and encompassing a source regionnear a top surface of said top epitaxial layer surrounding said trenchedgates wherein each trenched gate is padded by agate oxide layer andsurrounded completely by regions of said first conductivity typeincluding said source region and said top epitaxial layer of said firstconductivity type and wherein said trenched gate includes a gatematerial of a second conductivity type filling the trenches; and slotsopened in the top epitaxial layer and parallel to and disposed at adistance away from said trenched gates wherein said slots extended intosaid top epitaxial layer of the first conductivity type completelyfilled with a conductive material of said second conductivity type andsurrounded directly by said top epitaxial layer of said firstconductivity type wherein the slots having a top surface substantiallyat a same level with the source region and in direct contact with thesource region laterally extended from sidewalls of the trenched gates tothe slots.
 8. The accumulation mode field effect transistor of claim 7wherein: said trenched gate includes a stick-up gate segment with thegate material extended above a top surface of said semiconductorsubstrate and the stick-up segment is surrounded by sidewall spacersdisposed above the source region.